Proceedings of the ... International Vacuum Microelectronics ...
Charles E. Hunt
REFERENCES [1] Kyung Ho Park, Seungho Choi, Kyung Moon Lee, Soonil Lee, and Ken Ha Koh, J. Vac. Sci. Technol. B 19, 958 (2001) [2] Kyung Ho Park, Kyung Moon Lee, Seungho Choi, Soonil Lee, and Ken Ha Koh, J. Vac. Sci. Technol.