2001 International Vacuum Microelectronics Conference
Charles E. Hunt
REFERENCES [1] Kyimg Ho Park, Seungho Choi, Kyung Moon Lee, Soonil Lee,
and Ken Ha Koh, J . Vac. Sci. Technol. B 19, 958 (2001) [2] Kyung Ho Park,
Kyimg Moon Lee, Seungho Choi, Soonil Lee, and Ken Ha Koh, J . Vac. Sci.
Technol.